Sputter Deposition (2 x 3" mags, 2 gas lines)

$125,800.00
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Availability:
Usually ready for collection in 12 weeks after receipt of initial payment

Specification Highlights:

  • 300W RF Generator with auto-matching
  • Stainless Steel chamber with internal shields
  • 160mm electrode with rotation (optional water cooling)
  • 2 gas lines (inc. MFC)
  • 2 x 3" Magnetrons plus fittings
  • Internal PLC control system
  • Touch-screen interface
  • Capacitance manometer for pressure measurement
  • WRG gauge for base pressure measurement
  • Automatic closed-loop pressure control
  • Close-coupled Turbo (requires backing pump)
  • All control within frame to minimise footprint
  • Built in process recipe control and data logging

 

For full description, please refer to the Specification Document prior to purchase.

1 year from delivery and limited to return for repair or replacement, which ever is more economical. Technical support is limited to 40 hrs (phone or email).