Specification Highlights:
- 300W RF Generator with auto-matching
- Stainless Steel chamber with internal shields
- 160mm electrode with rotation (optional water cooling)
- 2 gas lines (inc. MFCs)
- 3 x 2" Magnetrons plus fittings
- Internal PLC control system
- Touch-screen interface
- Capacitance manometer for pressure measurement
- WRG gauge for base pressure measurement
- Automatic closed-loop pressure control
- Close-coupled Turbo (requires backing pump)
- All control within frame to minimise footprint
- Built in process recipe control and data logging
For full description, please refer to the Specification Document prior to purchase.
1 year from delivery and limited to return for repair or replacement, which ever is more economical.
Technical support is limited to 40 hrs (phone or email).
