RIE

$66,307.62
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Availability:
Usually ready for collection in 12 weeks after receipt of initial payment
Minimum Purchase:
1 unit

Specification Highlights:

  • 300W RF Generator with auto-matching
  • Aluminium chamber
  • 125mm electrode; water cooled
  • Internal PLC control system
  • Touch-screen interface
  • Capacitance manometer gauge for pressure measurement
  • Automatic closed loop pressure control
  • Close-coupled turbo
  • All control within frame to minimise footprint
  • Built in process recipe control and data logging

 

For full description, please refer to the Specification Document prior to purchase

1 year from delivery and limited to return for repair or replacement, which ever is more economical. Technical support is limited to 40 hrs (phone or email).