RIE Options

Edwards nXDS6i (5m3/Hr) plus cord set.   nXDS has been designed to combine the latest advances in scroll technology withan intelligent drive coupled with the long established, truly dry, hermetically sealedmechanism of the XDS series.Class leading...

HRS compact recirculating chillers are designed to meet the widest range of single-point applications in both industrial and technology settings. The package design is robust enough for the factory, yet ergonomic and compact for lab installations...

This product is wafer size dependent, so please make sure you specify the wafer size per platen at time of order.