Specification Highlights:
- 300W RF Generator with auto-matching
- Aluminium chamber with water cooling
- 240mm Heated electrode manufactured in stainless steel
- Internal PLC control system
- Touch-screen interface
- Capacitance manometer for pressure measurement
- Automatic closed loop pressure control
- All control within frame to minimise footprint
- Built in process recipe control and data logging
For full description, please refer to the Specification Document prior to purchase
1 year from delivery and limited to return for repair or replacement, which ever is more economical.
Technical support is limited to 40 hrs (phone or email).
