PECVD

$118,918.02
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Availability:
Usually ready for collection in 12 weeks after receipt of initial payment

Specification Highlights:

  • 300W RF Generator with auto-matching
  • Aluminium chamber with water cooling
  • 240mm Heated electrode manufactured in stainless steel
  • Internal PLC control system
  • Touch-screen interface
  • Capacitance manometer for pressure measurement
  • Automatic closed loop pressure control
  • All control within frame to minimise footprint
  • Built in process recipe control and data logging

 

For full description, please refer to the Specification Document prior to purchase

1 year from delivery and limited to return for repair or replacement, which ever is more economical. Technical support is limited to 40 hrs (phone or email).