Specification Highlights:
- 600W RF Generator with auto-matching
- Stainless Steel chamber with Aluminum Faraday Cage assembly
- 2 gas lines (inc. MFC)
- Internal PLC control system
- Touch-screen interface
- Capacitance manometer for pressure measurement
- Automatic closed-loop pressure control
- All controls are within frame to minimise footprint
- Built in process recipe control and data logging
For full description, please refer to the Specification Document prior to purchase
1 year from delivery and limited to return for repair or replacement, which ever is more economical.
Technical support is limited to 40 hrs (phone or email).
